Handbook of Thin Film Process Technology 99/1 : Substrate Preparation for Thin Film Deposition

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician.

The main work is regularly updated with new material, and this volume is a special issue on substrate cleaning which will be of interest to industrial and academic researchers in the semiconductor and optics industry in addition to owners of the main Handbook.

This supplement includes recipes which give precise instructions for the cleaning of specific substrates, for specific film depositions, or using specific techniques.

In addition, general articles evaluate the cleaning procedure, covering the usual contaminants, handling and storage of substrates, chemicals (for instance the importance of the pH of solution, particle deposition), DI quality (level of contamination, water drops), what is removed, drying (e.g. the Marangoni effect), and the surface of the substrate before deposition (composition, morphology, hydrophilic, hydrophobic).