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Characterization of Plasma-Enhanced CVD Processes: Volume 165

Hess, Dennis W.(Edited by)Ibbotson, D. E.(Edited by)Lucovsky, Gerald(Edited by)
Part of the MRS Proceedings series
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Product Details
Cambridge University Press
1107410282 / 9781107410282
Paperback
620.11
05/06/2014
United Kingdom
270 pages, black & white illustrations
152 x 229 mm, 370 grams
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