Handbook of Thin Film Process Technology

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. It covers all the most important thin film deposition techniques, as well as important aspects of film processing and the major diagnostic techniques for in-process monitoring. A unique feature of the Handbook is its presentation of recipe-type information (i.e., important deposition system details and process parameters) for a range of common materials and processes.

To allow the Handbook to remain the most up-to-date reference resource in its field, it is packaged in a loose-leaf binder, with additional material published regularly. The purchase price of the print edition includes four supplements from 1996 and 1997 (Thermal Spraying, Surface Modification in Vacuum, Miscellaneous Updates, Superlattices and Multilayered Systems). The 1998 and later supplements can be ordered separately.