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1999 IEEE International Symposium on Semiconductor Manufacturing : Conference Proceedings (1999 ed.)

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These proceedings cover: factory design; manufacturing strategy, control and execution; defect reduction and yield enhancement; ultra clean technology; process and metrology equipment; process and material optimization; and environemnt, safety and health.

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Product Details
I.E.E.E.Press
0780354036 / 9780780354036
Paperback / softback
01/01/1999
United States
482 pages
Professional & Vocational/Postgraduate, Research & Scholarly/Technical / vocational (manuals etc) Learn More