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Image for Material Science and MEMS Production

Material Science and MEMS Production

Liu, Chang Hui(Edited by)

Part of the Advanced Materials Research series

See all formats and editions

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China.

The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production

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Product Details

Publisher/Imprint Trans Tech Publications Ltd

ISBN/Ean3038350478 / 9783038350477

FormatPaperback / softback

Dewey620.11

Published29/05/2014

Country of PubSwitzerland

Pages128 pages, Illustrations, unspecified

Dimensions170 x 240 mm, 360 grams

BIC TGM Materials science