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Ion Implantation Technology (2011 ed.)

Aoki, Takaaki(Edited by), Kase, Masataka(Edited by), Matsuo, Jiro(Edited by), Seki, Toshio(Edited by)

Part of the AIP Conference Proceedings / Materials Physics and Applications series

See all formats and editions

The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.

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Product Details

Publisher/Imprint American Institute of Physics

ISBN/Ean0735408769 / 9780735408760

FormatMultiple-component retail product

Dewey530.416

Published25/01/2011

Country of PubUnited States

Pages532 pages, Illustrations

BIC PHFC Condensed matter physics (liquid state & solid state physics), TJFD Electronic devices & materials