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Image for Ultra Clean Processing of Semiconductor Surfaces VIII

Ultra Clean Processing of Semiconductor Surfaces VIII

Heyns, Marc(Edited by), Mertens, Paul(Edited by), Meuris, Marc(Edited by)
Part of the Solid state phenomena series
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Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.

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£263.00
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Product Details
Trans Tech Publications Ltd
3908451469 / 9783908451464
Paperback / softback
621.38152
05/03/2008
Switzerland
400 pages, Illustrations, unspecified
170 x 240 mm, 800 grams
Professional & Vocational/Postgraduate, Research & Scholarly Learn More
TJFD5 Semi-conductors & super-conductors
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