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Optical Microlithography XXI

Dusa, Mircea V., Levinson, Harry J.

Part of the Proceedings of SPIE series

See all formats and editions

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics.

These books provide prompt access to the latest innovations in research and technology in their respective fields.

Proceedings of SPIE are among the most cited references in patent literature.

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Product Details

Publisher/Imprint SPIE Press

ISBN/Ean0819471097 / 9780819471093

FormatPaperback / softback

Dewey621.381531

Published30/08/2008

Country of PubUnited States

Pages1738 pages, Illustrations (some col.)

ReadershipProfessional & Vocational Learn More

BIC TTB Applied optics