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Thin Film Processes

Vossen, John L.

See all formats and editions

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching.

It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint.

Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.

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Product Details

Publisher/Imprint Academic Press

ISBN/Ean0323138985 / 9780323138987

FormateBook (Adobe Pdf)

Dewey621.38171

Published02/12/2012

Book LanguageEnglish

Pages557 pages

Copy LimitsCopy: 10%; print: 10%

BIC TGM Materials science