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Image for Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, Maryland, 27-29 Marc

Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, Maryland, 27-29 Marc

Diebold, Alain C.(Edited by), Garner, C. Michael(Edited by), Herr, Dan(Edited by), Khosla, Rajinder P. (National Science Foundation)(Edited by), McDonald, Robert(Edited by), Secula, Erik M. (National Institute of Standards and Technology)(Edited by), Seiler, David G.(Edited by)
Part of the AIP Conference Proceedings / Materials Physics and Applications series
See all formats and editions

This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology.

It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.

It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed.

It also offers a foundation for further advances in metrology and new ideas for research and development.

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Product Details
American Institute of Physics
0735404410 / 9780735404410
Pbk. + CDROM
621.3815
15/12/2007
United States
English
578 p. : ill. (some col.)
28 cm
Conference proceedings.
TBN Nanotechnology, TJ Electronics & communications engineering
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