Movpe of Compound Semiconductors

The rapid development of low-pressure metal organic vapour phase epitaxy for the preparation of compound semiconductors can make it difficult for the newcomer to the subject to gain a balanced view of the whole field.

At the same time, the working specialist researcher often finds that the literature on the subject is growing at a rate that makes it difficult to keep in touch with the most significant latest developments.

This book provides an accessible introduction to the MOVPE method.

To put the technique in context, it surveys other methods of epitaxial growth, PLE, VPE, MBE and MOMBE, with a clear indication of their advantages and drawbacks.

Detailed accounts of the MOVPE growth process, equipment design and applications of the method for the preparation of compound semiconductors provide a thorough grounding in the practice and theory of MOVPE.

The value of the book to the established researcher is further enhanced by the inclusion of the latest innovations in methodology and novel applications in such areas as high temperature superconductors.

A constant emphasis on safe handling of materials is an important feature throughout.

Graduate students and professionals in electronics, device physics, materials science and condensed matter physics will all appreciate its clear, concise treatment of a techinique that continues to increase in importance.