Progress on Advanced Manufacture for Micro/Nano Technology 2005

This is a time of newly emerging research topics in manufacturing technologies such as MEMS/Nano-Technology, Photo-Electric Devices, Precision Mechanical, Semiconductor and Optico-Mechatronic Manufacturing Technologies as well as Advanced Manufacturing and Automation Technology.

The objective of this book is to provide a timely opportunity for the manufacturing community to present its newest research results, exchange ideas and become familiar with new trends and directions in the above manufacturing fields.Volume is indexed by Thomson Reuters CPCI-S (WoS).This two-volume set comprises 220 contributions, and it is anticipated that this work will give its readers the chance to understand, communicate and cooperate on a variety of contemporary topics related to advanced manufacturing integration issues.

The collection is divided into the sections: A: MEMS/Nano-Manufacturing Technology, B: Precision Mechanical Manufacturing Technology, C: Manufacturing Technology for Photoelectric Devices, D: Semiconductor Manufacturing Technology, E: Metrology for Advanced Manufacturing, F: Applications of MEMS and Nano-Systems, H: CAD/CAE/CAM/CIM, I: Optico-Mechatronic Technology, J: E-Manufacturing and E-Management Integration, Q: Advanced Nano/Micro Technology in Bio-Applications, K: Metal Forming, L: Material-Removal Processes, including Cutting, Grinding, Lapping, Polishing, ECM and EDM, M: Machining and Non-Traditional Machining, N: Manufacturing Management, P: Mechanisms for Manufacturing or Automation, R: Others, T: Advanced Mechatronics and Control in Automation and Manufacturing, U: Fine Machining of Nontraditional Materials, V: 3-D Printing Core Technology, W: Materials Forming.

Also included are two keynote lectures: Developing a Nanowriter System: Simulation and Experimental Set-Up of a Plasmonic-Based Lens Design by C.K.

Lee et al. and Nanometrology - Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes by G.

Jager et al.